Products

Tier 2 supplier: OEM parts for world-leading semiconductor companies and its equipment Suppliers

We manufacture and provide high purity, high temperature and hi-tech quartz-ware parts and solutions.

Our Products

  • FOCUS RING, COVER RING, SHADOW RING, CONFINMENT RING, OTHER RING PARTS

  • DISC

  • CUSTOMIZED QUARTZ-WARE PARTS

Product Features

Purity(%) 순도 99.99
Thermal Resistance(ºC) 내열성 >1200ºC
Thermal Conductivity(W/mK)열전도  1.5
Thermal Expansion(x10-6/°C) 열팽창계수 4.3
Bulk Density(g/cm³) 밀도 >2.15
Load0.5Kg HV1=9.807N Vickers Hardness(GPa) 비커스경도 8.6
Bending Strength(MPa) 굽힘강도 70
Compressive Strength(MPa) 압축강도 1100
Specific Heat([RT]J/kg.K)비열 0.2
Volume Resistivity(Ω. ㎝)체적고유사항 >1014
Dielectric Constant(25°C 1MHz)유전상수 3.75