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제품소개
OEM Parts
반도체 에칭, 확산공정 등의 OEM Parts
고순도, 고온 및 내화학적 특성이 우수하여
반도체 에칭, 확산등 각 공정에서 사용됩니다.
제품 사진
FOCUS RING, COVER RING, SHADOW RING, CONFINMENT RING, 각종 RING 류
DISC 류
기타 쿼츠제품
제품 특성표
| Purity(%) 순도 | 99.999 |
| Thermal Resistance(ºC) 내열성 | >1200ºC |
| Thermal Conductivity(W/mK)열전도 | 1.5 |
| Thermal Expansion(x10-6/°C) 열팽창계수 | 4.3 |
| Load0.5Kg HV1=9.807N Vickers Hardness(GPa) 비커스경도 | 8.6 |
| Bending Strength(MPa) 굽힘강도 | 70 |
| Compressive Strength(MPa) 압축강도 | 1100 |
| Specific Heat(20~350◦C) | 670 |
| Dielectric Constant(25°C 1MHz)유전상수 | 3.7~3.9 |
